Kayan da halaye na substrates

Tare da ci gaba da haɓaka fasaha, aikin aiki na yanzu, yanayin zafin jiki da mita a cikin na'urori da aka sannu a hankali. Don saduwa da disk of na'urori da da'irori, ana sa buƙatun mafi girma don guntu chops. Anyi amfani da su sosai a cikin waɗannan filayen saboda kyawun ƙa'idodin thermal kaddarorin, kaddarorin lantarki, kaddarorin na inji da dogaro.

At present, the main ceramic materials used in ceramic substrates are: alumina (Al2O3), aluminum nitride (AlN), silicon nitride (Si3N4), silicon carbide (SiC) and beryllium oxide (BeO).

(KV / MM ^ (- 1

Ma lasaal	Tsarkakewa	da Tsarin Haskakawa (W / KM)	Danshi mai	rikitarwa na wutar lantarki mai rikitarwa	) ) taƙaitaccen
commme	nt	s	Al2o3	99	%	Yawancin aikace-aikacen aikace-aikace
AlN	99%	150	8.9	15	mafi girma aiki, Amma mafi girma kudin
beo	99%	60	6.4	foda tare da mai guba, iyaka don amfani	da
Si3n4	99	%	Aika	mafi ƙarancin	aiki
Sic 99% 270 0.7	ya	dace	da	aikace	-aikacen mitar

Bari mu ga taƙaitaccen halaye na waɗannan fam 5 masu girma don substrates kamar haka:

1. Alfea (Al2o3)

Polycrystal polycrystals na iya kaiwa fiye da nau'ikan 10, kuma babban nau'in nau'ikan abubuwa sune kamar haka: α-al2o3, γ-al2o3 da ZTA-Al2o3. Daga cikinsu, α-al2o3 yana da mafi ƙasƙanci aiki kuma shine mafi ƙasƙanci a cikin manyan siffofin Rhomboedron, da tsarin na Hexagonal. Tsarin al2O3 yana da ƙarfi, tsarin ƙasa, yana iya wanzuwa a kowane yanayi; Lokacin da zazzabi ya kai 1000 ~ 1600 ° C, wasu bambance-bambancen ba za su iya canzawa zuwa α-Al2o3 ba.

Hoto 1: Crystal microsturure na Al2o3 a karkashin Sem

Tare da karuwar juzu'i na Al2O3 da raguwar gilashin da ke da alaƙa taro na Al2O3 ya kai da sauri, lokacin da kashi na yawan theryer ya ninka. 90%.

Kodayake yana kara yawan adadin Al2O3 na iya inganta ci gaba na garin Bramics, shi ma yana haɓaka zazzabi na berammens, wanda ke kai tsaye yana haifar da karuwar farashin samarwa.

2. Aluminum nitride (AlN)

AlN wani nau'in rukuni ne na fili tare da tsarin Wurtzite. Jariyyar keɓaɓɓiyar ita ce AlN4 Tetraheredron, wanda ke da tsarin helagonal na heloagonal kuma yana da karfi mai ƙarfi, saboda haka yana da kyakkyawan kayan aikin injin da ƙarfi. Da asoretically, masanin kayatarwa shine 3.2611g / cm3, saboda haka yana da babban ma'auni na 320w / (M.) A zazzabi mai zafi na ALN-OREDD ALN Substrate na iya kai 150w / (Mb K), wanda yafi sau 5 da na Al2o3. Matsakaicin yaduwar zafi shine 3.8 × 10-6 ~ 4.4 × 10-6 / wanda aka daidaita shi da ingantaccen ingantaccen kayayyaki na semicalondantorks kamar Si, Sic da Gaas.

Hoto na 2: Foda na aluminum nitride

Aln Teramics suna da babban aikin da ke cikin therymens fiye da na Al2O3, wanda sannu a hankali ya maye gurbin Al2o3 na bukatar babban sokin lantarki, kuma suna da babban mawuyacin aiki. Hakanan ana daukar Alnreer na Aln a matsayin kayan da aka fi so don taga isar da makamashi na wutar lantarki saboda ƙarancin kariyar sakandare.

3. silicon nitride (si3n4)

Si3n4 ya danganta fili mai ƙarfi tare da tsarin lu'ulu'u uku: α-si3n4, β-si3n4, da γ-si3n4. Daga cikinsu, α-si3n4 da β-si3n4 siffofin gama gari ne, tare da tsarin hexagonal. Yin amfani da therymal sutture na Single Crystal Si3n4 zai iya kaiwa 400w / (M.). Koyaya, saboda yanayin zafi na wayoyin, akwai lahani a cikin wurin da wuri, da impulates sa phonon warwatse shine kusan 20w / (m.) . Ta hanyar inganta gwargwado da tsarin suna, aikin halayen da yake kai ya kai 106W / (MH KH). Tsarin yaduwar yaduwa na Si3n4 shine kusan 3.0 × 10-6 / c, wanda yake dacewa da kayan kwalliya da kayan kwalliya mai kyau.

Hoto na 3: foda na silicon nitride

Daga cikin masu sittin dazuzzuka, si3n4 substrates ana ɗauka su zama mafi kyawun kayan yaduwa kamar babban ƙarfin hali, ƙarfin zazzabi, ɗaukar nauyi na ƙasa, sa juriya da juriya da juriya da lalata. A halin yanzu, an yi falala a cikin watsawa na Igbt kuma sannu a hankali ya maye gurbin Al2o3 da Aln Ceramic substres.

4.Silicon Carbide (Sic)

Single Crystal Sic an sani shi da na uku tsara semiconduttor kayan, wanda ke da fa'idodi na babban gibin, babban abin da ake amfani da wutar lantarki mai tsayi da sauri.

Ta hanyar ƙara karamin adadin beo da B2O3 zuwa ga ƙararrawa, sannan kuma ƙara yawan matsakaicin yanayin zafi, zaku iya shirya yawan matsi da kilo 98% na SIC Gerorics. Yin ƙayyadaddun yanayin sihiri na Sic Brirpic tare da tsafta daban-daban wanda abubuwa daban-daban suka shirya ta hanyoyi daban-daban da ƙari sune 100 ~ 490W / (M un) a zazzabi a ɗakin. Saboda matsalar ta hanyar sic ceramics tana da girma sosai, kawai ya dace da aikace-aikacen mitar-mitar, kuma bai dace da aikace-aikacen mitar ba.

5. Beryllia (beo)

Tsarin Beo shi ne tsarin Wurtzite da tantanin halitta shine tsarin Cubic Cubic. Aikin sa na theryer yana da girma sosai, ciyawar taro na 99% Beo Brorormens, a zazzabi mai zafi (Ma'anar da ƙiyayya da zafin rana (ME), kimanin sau 10 da ƙimar ƙayyadaddun ƙwayar ƙwayar ƙwayar al2O3. Ba wai kawai yana da ƙarfin zama mai sauƙin zafi ba, amma kuma yana da asarar yanke shawara koyaushe da kuma shimfidar ƙasa da alluna masu ƙarfi da kewaya suna buƙatar babban aiki na wutar lantarki.

Hoto na 5: Tsarin Crystal na Beryllia

High-high thery Hernery da ƙarancin halayen Beo sun kasance ba wanda ba su da tabbas daga wasu kayan yumbu, amma Beo yana da gavical ga ga gavactoming sosai, da foda yana da guba sosai.

A halin yanzu, abubuwan da aka saba amfani da su da aka saba amfani da su a kasar Sin ana yawanci Al2o3, aln da si3n4. Fasahar yumbu ta LTCC tana iya haɗa abubuwan da ke jujjuyawa kamar su, kamar tsayayya, masu ɗaukar nauyi da masu shiga cikin tsarin abubuwa uku. Ya bambanta da haɗin gwiwar semiconducor, waɗanda suke da farko na'urori na'urori, Ltcc yana da ƙarfin haɓaka 3D tsakanin hanyoyin haɓaka 3D.